UV Laser parameters

Please share your laser parameters with the group. It doesn't matter if you have different parameters for a material that is posted already, the parameters differ quite a lot depending on the optimization goal: A parameter set that gives fast and clean cuts through silicon might be unfeasable for hatching.

Wafer level materials

Material	hatch or cut?	thickness	Power	Velocity	Pulse frequency	hatch parameters or parallel lines	Repetitions	Project or comments	Name
Silicon	cut	300 µm	100%	10 mm/s	20 kHz	5 lines, 125 µm wide	16	fast cut	Brunne
Silicon	hatch	250 µm	100%	700 mm/s	20 kHz	8 hatches, 45° inc. 8µm spacing	70	low roughness	Brunne, Wiedenmann
Silicon	cut	500 µm	100 %	10 mm/s	20 kHz	7 Lines, 180µm wide	16	fast cut	Brunne
Glass	cut	1000 µm	100%	10 mm/s	20 kHz	0,5 mm width	2?	Bluetape on top	Kamberger
Glass	hatch	550 µm	100%	100 mm/s	20 kHz	8 hatches, 45° inc. 8µm spacing	15	Hole through glass wafer, works only if the laser power is optimal!	Krausse
Glass (wafer)	cut	500 µm	100 %	30 mm/s	20 kHz	13 parallel lines, 0.25 mm width, 200% filling	6 x on top, 18 x in 0.35 mm depth, 3 x in 0.6 mm depth	EAGLE 2	Stürmer
Cr/Au on glass wafer	cut	500 nm	100%	800 mm/s	70 kHz	Single line	22	Electrical circuits on glass	Krausse
Cr/Au on glass wafer	hatch	500 nm	100%	500 mm/s	20 kHz	hatch StefanK_CrAu	10	Electrical circuits on glass	Krausse
Pyrex	cut by hatch	500 µm	Spengler

Ceramics

Material	hatch or cut?	thickness	Power	Velocity	Pulse frequency	hatch parameters or parallel lines	Repetitions	Project or comments	Name
PZT	cut	200 µm	100%	200 mm/s	40 kHz	6 lines, 0,12 mm	220	monomorph piezo	Kamberger
PZT	hatch	??	100%	700 mm/s	20 kHz	11	Kamberger
PZT	cut	200 µm	100%	100 mm/s	40 kHz	6 lines, 0,12 mm	220	bimorph piezo, integrate short break between cycles for cooling	Kamberger
PZT	cut	120 µm	100%	100 mm/s	20 kHz	Single line	200	MAXWELL, linear Axicon mirror	Brunne
PZT Ekulit single layer	cut	ca. 120 µm	100 %	100 mm/s	20 kHz	Single line	150	EAGLE 2	Stürmer
PZT Ekulit glued bimorph	cut	ca. 250 µm	100 %	100 mm/s	20 kHz	4 parallel lines, 0.1 mm width	110	EAGLE 2	Stürmer
ceramic	cut	700 µm	100%	10 mm/s	20 kHz	20 lines, 0,5 mm	120	time: 25 minutes for 2mm circle	Wiedenmann

Glasses

A start layer is needed (e.g. Scotch Magic Klebeband 811)

Material	hatch or cut?	thickness	Power	Velocity	Pulse frequency	hatch parameters or parallel lines	Repetitions	Project or comments	Name
Glass (cover slip)	cut	170 µm	100 %	30 mm/s	20 kHz	13 parallel lines, 250 µm width	6	EAGLE 2	Schatz
Glass (wafer)	cut	550 µm	100 %	30 mm/s	20 kHz	13 parallel lines, 250 µm width; Sequence:1) 10xdefocus=0µm; 2) 20xdefocus=350µm; 3) 12xdefocus=600µm. Additional hatch: 10xspirals (8µm spacing, 20° inc).	sequence	only small holes (1mm diameter)	Schatz
Glass (wafer)	hatch	ca. 100 µm	100 %	20 mm/s	20 kHz	hatch: spirals (8 µm spacing, 20° inc)	7	EAGLE 2	Schatz

Polymers

Material	hatch or cut?	thickness	Power	Velocity	Pulse frequency	hatch parameters or parallel lines	Repetitions	Project or comments	Name
Kapton	cut	120 µm	100%	170 mm/s	25 kHz	single line	18	–	Brunne, Gleißner
Kapton	cut	50 µm	100%	170 mm/s	25 kHz	single line	10	Inkjet printed AgNP	Bollgrün
SU-8	hatch	10 µm	70%	950 mm/s	48 kHz	2 hatches, 90° inc., 5 µm spacing	1	MAXWELL	Schöttler, Brunne
Paper-base plastics	cut	1 mm	100%	75 mm/s	20 kHz	5 lines, 125 µm wide	25	3D Energy Harvester	Lausecker
Paper-base plastics (FR2)	cut	1 mm	100%	75 mm/s	20 kHz	5 lines, 125 µm spacing, defocus corrected!	16	MAXWELL	Brunne
Paper-base plastics (FR2)	hatch	635 µm	100%	100 mm/s	20 kHz	20µm spacing, 4 hatches	3	MAXWELL	Brunne
Paper-base plastics	hatch	235	100%	150 mm/s	20 kHz	20µm spacing, 4 hatches	2	MAXWELL	Brunne
unknown katheter polymer	hatch	180 µm	100%	800 mm/s	20 kHz	4 hatches, 45° inc., 10 µm spacing	2	Katheter (hole for capacitor)	Wiedenmann
Mylar	cut	350 µm	100%	100 mm/s	25 kHz	single line	18	for small parts insert 1s wait	Wapler
Double-sided sticky foil	cut	90 µm Tape (10 µm adhesive)	20 kHz	single line	2	Transformer	Spengler
PDMS	cut	550µm	100%	50 mm/s	20 kHz	250µm trench, 10 parallel lines	15	MAXWELL	Brunne

Metals

Material	hatch or cut?	thickness	Power	Velocity	Pulse frequency	hatch parameters or parallel lines	Repetitions	Project or comments	Name
Aluminum foil	cut	18µm	100%	10mm/s	20kHz	–	3	Microlev - cut through after 1 or 2 rep.	Brunne
spring band steel	hatch	150 µm	100%	20mm/s	20 kHz	8 hatches, 45° inc. 8µm spacing, no margin	20	Hole	Wiedenmann
Steel sheet	cut	120 µm	100%	10mm/s	20 kHz	3 parallel lines, 60 µm wide	15	“fast” cut, 0.21 mm/s	Brunne

Particle filled polymers

Material	hatch or cut?	thickness	Power	Velocity	Pulse frequency	hatch parameters or parallel lines	Repetitions	Project or comments	Name
mPDMS	hatch	300 µm	100%	150 mm/s	25 kHz	9 hatches, 220° inc., 25µm spacing	1	large hatch	Feser
mPDMS	hatch	300 µm	100%	75 mm/s	20 kHz	9 hatches, 220° inc., 25µm spacing	1	fine hatch	Feser
cPDMS	cut	~20 µm	100%	250 mm/s	50 kHz	single line	1	cPDMS actuators	Brunne

UV exposure of photoresists

Material	hatch or cut?	thickness	Power	Velocity	Pulse frequency	hatch parameters or parallel lines	Repetitions	Project or comments	Name
PCB	hatch	Standard PCB resist	5%	5 mm/s	40 kHz	parallel lines, 30 µm spacing	4-6	??	??
PCB	hatch	direct ablation of photoresist	100%	600 mm/s	20 kHz	10µm spacing, 2×90°,13µm margin