======Laser calibration======
^ Date        ^ Test structure              ^ Defocus                    ^ Depth     ^ Remarks                                     ^ Name                ^
| 14.05.2012  | Defocus_5x                  | 3 mm                       | 52 µm     | warm up ~1h                                 | Brunne              |
| 15.05.2012  | Defocus_5x                  | 3 mm                       | 49.7 µm   | warm up ~1h                                 | Brunne              |
| 18.05.2012  | Defocus_5x                  | 3 mm                       | ??        |                                             | Wiedenmann          |
| 23.05.2012  | Defocus_5x                  | 3 mm                       | 48.4 µm   | warm up: ~2h                                | Brunne              |
| 24.05.2012  | Defocus_5x                  | 3 mm                       | 39.3 µm   | warm up: ~30 min                            | Stürmer             |
| 24.05.2012  | Defocus_semiHighRes_3mm_5x  | 3 mm                       | 53.7 µm   | warm up: ~ 1h                               | Stürmer             |
| 25.05.2012  | Defocus_semiHighRes_3mm_5x  | constant between 3 - 4 mm  | 47.08 µm  | warm up: ~2.5 h (? user before)             | Stürmer             |
| 05.06.2012  | Defocus_5x                  | 3 mm                       | 41 µm     | warm up: ?                                  | Brunne              |
| 08.06.2012  | Defocus_5x                  | 0 mm                       | 49.3 µm   | 2h warm up                                  | Brunne              |
| 11.06.2012  | Defocus_5x                  | 0 mm                       | 44 µm     | ?                                           | Spengler / Stürmer  |
| 11.06.2012  | Defocus_5x                  | 0mm                        | 49.8µm    | long warm up/multiple users                 | Brunne              |
| 23.07.2012  | Defocus_5x                  | 0mm                        | 51.6 µm   | Long warmup                                 | Brunne              |
| 21.11.2012  | Defocus_5x                  | 0,5mm                      | 44 µm     | Long warmup                                 | Brunne              |
| 15.12.2012  | Defocus_5x                  | -1 mm                      | 38.9 µm   | warm up: 3h                                 | Brunne              |
| 17.12.2012  | Defocus_5x                  | 1 mm                       | 54 µm     | Current through diodes increased to 30.2 A  | Brunne              |
| 17.12.2012  | Defocus_5x                  | 0 mm                       | 52.4 µm   | Defocus adjusted to 131                     | Brunne              |
| 11.01.2013  | Defocus_5x                  | -2,5 mm                    | 35 µm     | warm up: 2,5h                               | Wiedenmann          |
| 07.02.2013  | Defocus_5x                  | -2,5 mm                    | 36 µm     |                                             | Schatz/Wiedenmann   |
| 24.09.2013  | Defocus_5x                  | 0 mm                       | 40 µm     | long warm up (>2h)                          | Brunne              |














Defocus_5x test structure in silicon: Result of Profilometer measurement\\
{{:laser:2012.05.15_-_3mm_defokus_beschriftet.png?600|}}\\

== Test patterns ==
  * {{:laser:testfeld_defokus_5_repetition.zip|Defocus_5x laser file for defocus calibration with 0.5 mm steps from -5 to 5 mm}} The file takes 248s to structure.
  * {{:laser:testfeld_defokus_semiHighRes_3mm_5_repetition.zip|Defocus_5x laser file for defocus calibration with 0.1 mm steps from 2 to 4 mm}}