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How to calibrate the stages

Align coordinate systems of laser and stages

Adjust the stages to a 90° angle

The MICOS HPS170 stages are mounted orthogornally. The alignment is achieved by pins. This however is not precise enough for our applications. To manually adjust the angle, remove one pin and loosen the screws of the stages. To reach the screws, you have to drive the stage to its middle position. Mount the PRS-110 rotation stage so that you can still reach one screw. Place the foil mask with the black cross on top of the rotation stage. You can fix it in place with 4 M6 screws. Use a washer! Now align the x-coordinate in parallel with the foil mask by using the alignment program with a correction angle of 0°. Now you can adjust the y-axis by carefully knocking on it and measuring the angle. Repeat until the two axes are at an angle of 90°.


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