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Laser calibration

Date	Test structure	Defocus	Depth	Remarks	Name
14.05.2012	Defocus_5x	3 mm	52 µm	warm up ~1h	Brunne
15.05.2012	Defocus_5x	3 mm	49.7 µm	warm up ~1h	Brunne
18.05.2012	Defocus_5x	3 mm	??		Wiedenmann
23.05.2012	Defocus_5x	3 mm	48.4 µm	warm up: ~2h	Brunne
24.05.2012	Defocus_5x	3 mm	39.3 µm	warm up: ~30 min	Stürmer
24.05.2012	Defocus_semiHighRes_3mm_5x	3 mm	53.7 µm	warm up: ~ 1h	Stürmer
25.05.2012	Defocus_semiHighRes_3mm_5x	constant between 3 - 4 mm	47.08 µm	warm up: ~2.5 h (? user before)	Stürmer
05.06.2012	Defocus_5x	3 mm	41 µm	warm up: ?	Brunne
08.06.2012	Defocus_5x	0 mm	49.3 µm	2h warm up	Brunne
11.06.2012	Defocus_5x	0 mm	44 µm	?	Spengler / Stürmer
11.06.2012	Defocus_5x	0mm	49.8µm	long warm up/multiple users	Brunne
23.07.2012	Defocus_5x	0mm	31,5 µm	Low laser power! Long warmup!	Brunne

Defocus_5x test structure in silicon: Result of Profilometer measurement