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Laser calibration

Date Test structure Defocus Depth Remarks Name
14.05.2012 Defocus_5x 3 mm 52 µm warm up ~1h Brunne
15.05.2012 Defocus_5x 3 mm 49.7 µm warm up ~1h Brunne
18.05.2012 Defocus_5x 3 mm ?? Wiedenmann
23.05.2012 Defocus_5x 3 mm 48.4 µm warm up: ~2h Brunne
24.05.2012 Defocus_5x 3 mm 39.3 µm warm up: ~30 min Stürmer
24.05.2012 Defocus_semiHighRes_3mm_5x 3 mm 53.7 µm warm up: ~ 1h Stürmer
25.05.2012 Defocus_semiHighRes_3mm_5x constant between 3 - 4 mm 47.08 µm warm up: ~2.5 h (? user before) Stürmer
05.06.2012 Defocus_5x 3 mm 41 µm warm up: ? Brunne
08.06.2012 Defocus_5x 0 mm 49.3 µm 2h warm up Brunne
11.06.2012 Defocus_5x 0 mm 44 µm ? Spengler / Stürmer
11.06.2012 Defocus_5x 0mm 49.8µm long warm up/multiple users Brunne
23.07.2012 Defocus_5x 0mm 51.6 µm Long warmup Brunne
21.11.2012 Defocus_5x 0,5mm 44 µm Long warmup Brunne
15.12.2012 Defocus_5x -1 mm 38.9 µm warm up: 3h Brunne

Defocus_5x test structure in silicon: Result of Profilometer measurement

Test patterns

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