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UV Laser parameters

Please share your laser parameters with the group. It doesn't matter if you have different parameters for a material that is posted already, the parameters differ quite a lot depending on the optimization goal: A parameter set that gives fast and clean cuts through silicon might be unfeasable for hatching.

Wafer level materials

Material hatch or cut?thicknessPowerVelocityPulse frequencyhatch parameters or parallel lines RepetitionsProject or comments Name
Silicon cut 300 µm 100% 10 mm/s 20 kHz 5 lines, 125 µm wide 16 fast cut Brunne
Silicon hatch 250 µm 100% 700 mm/s 20 kHz 8 hatches, 45° inc. 8µm spacing 70 low roughness Brunne, Wiedenmann
Glass cut 1000 µm100% 10 mm/s 20 kHz 0,5 mm width 2? Bluetape on top Kamberger
Glass hatch 550 µm 100% 100 mm/s 20 kHz 8 hatches, 45° inc. 8µm spacing 15 Hole through glass wafer, works only if the laser power is optimal! Krausse
Cr/Au on glass wafer cut 500 nm 100%800 mm/s 70 kHz Single line 22 Electrical circuits on glass Krausse
Cr/Au on glass wafer hatch 500 nm 100%500 mm/s 20 kHz hatch StefanK_CrAu 10 Electrical circuits on glass Krausse
spring band steel hatch 150 µm 100%20mm/s 20 kHz 8 hatches, 45° inc. 8µm spacing, no margin 20 Hole Wiedenmann
Steel sheet cut 120 µm 100%10mm/s20 kHz 3 parallel lines, 60 µm wide 15 “fast” cut, 0.21 mm/s


Ceramics

Material hatch or cut?thicknessPowerVelocityPulse frequencyhatch parameters or parallel lines RepetitionsProject or comments Name
PZT cut 200 µm 100% 200 mm/s 40 kHz 6 lines, 0,12 mm 220 monomorph piezo Kamberger
PZT hatch ?? 100% 700 mm/s 20 kHz 11 Kamberger
PZT cut 200 µm 100% 100 mm/s 40 kHz 6 lines, 0,12 mm 220 bimorph piezo, integrate short break between cycles for cooling Kamberger
PZT cut 120 µm 100% 100 mm/s 20 kHz Single line 200 MAXWELL, linear Axicon mirror Brunne
ceramic cut 700 µm 100% 10 mm/s 20 kHz 20 lines, 0,5 mm 120 time: 25 minutes for 2mm circle Wiedenmann


Polymers

Material hatch or cut?thicknessPowerVelocityPulse frequencyhatch parameters or parallel lines RepetitionsProject or comments Name
Kapton cut 120 µm 100% 170 mm/s 25 kHz single line 18 Brunne, Gleißner
Kapton cut 50 µm 100% 170 mm/s 25 kHz single line 10 Inkjet printed AgNP Bollgrün
SU-8 hatch 10 µm 70% 950 mm/s 48 kHz 2 hatches, 90° inc., 5 µm spacing 1 MAXWELL Schöttler, Brunne
Paper-base plastics cut 1 mm 100% 75 mm/s 20 kHz 5 lines, 125 µm wide 25 3D Energy Harvester Lausecker
unknown katheter polymer hatch 180 µm 100% 800 mm/s 20 kHz 4 hatches, 45° inc., 10 µm spacing 2 Katheter (hole for capacitor) Wiedenmann


Particle filled polymers

Material hatch or cut?thicknessPowerVelocityPulse frequencyhatch parameters or parallel lines RepetitionsProject or comments Name
mPDMS hatch 300 µm 100% 150 mm/s 25 kHz 9 hatches, 220° inc., 25µm spacing 1 large hatch Feser
mPDMS hatch 300 µm 100% 75 mm/s 20 kHz 9 hatches, 220° inc., 25µm spacing 1 fine hatch Feser
cPDMS cut ~20 µm 100% 250 mm/s 50 kHz single line 1 cPDMS actuators Brunne


UV exposure of photoresists

Material hatch or cut?thicknessPowerVelocityPulse frequencyhatch parameters or parallel lines RepetitionsProject or comments Name
PCB hatch Standard PCB resist5%5 mm/s 40 kHz parallel lines, 30 µm spacing 4-6 ?? ??

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